MEMS-based Sensor Technology

High Precision, Low Power, Miniature Sensor Solutions


MEMS Acceleration Switch Array

Evigia delivers a complete MEMS-based sensor portfolio, from discrete single and multi-sensors to fully-integrated solutions, designed to fulfill a broad range of applications and design needs.

Evigia can deliver custom and contract designs for low to mass volume products and parts, leveraging established relations and proven designs in top-tier MEMS and semiconductor foundries.

MEMS-based Environment and Physical Sensors:

Evigia delivers high-performance MEMS sensors for:

  • Accelerometers
  • Gyroscopes
  • Pressure sensors
  • Temperature
  • Humidity
  • Strain / Stress
  • Mechanical shock and vibrations
  • Strain / Stress
  • Impact and blast

High Performance MEMS-Based Sensor Designs


Hybrid MEMS-IC prognostic microsystem

Evigia’s MEMS systems employ proprietary chip-scale sensors, ultra-energy efficient integrated circuits and systems technologies and take advantage of combined manufacturing and packaging technologies to form single and multi-sensor miniature sensor system. Evigia’s MEMS-based systems integrate temperature, shock, vibration, and strain sensors atop of a low-power circuit chip using innovative semiconductor and micro electro-mechanical systems (MEMS) manufacturing technology that can be carried out in high-volume and low-cost at standard industry foundries. The combination and co-fabrication of the sensors, circuits, and packaging on a single silicon chip or in a hybrid MEMS-IC package along with novel systems architecture, highly sensitive and energy efficient sensors and electronics result in superior performance and low energy consumption, at a low cost, and in small form factor. These features facilitate easy embedding of the sensor systems into a broad range of designs.

Want to learn more? Our engineering staff is available to talk with you about your application’s requirements. Call us at (734) 302-1140 or contact us online to learn more.